ULSI Process Integration : proceedings of the International Symposium
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Bibliographic Information
ULSI Process Integration : proceedings of the International Symposium
（Proceedings / [Electrochemical Society], v. 2001-2,
Electrochemical Society, c2001-2005
- II
- III
- IV
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Note
II: "... the second international symposium on ULSI Process Integration, held in Washington D.C. on March 24-31, 2001 as part of the 199th Meeting of the Electrochemical Society"--on pref
II: xiii, 614 p.
III: "... Third Symposium on ULSI Process Integration held in Paris, France at the 203rd Meeting of the Electrochemical Society, April 28-May 2, 2003" --on pref.
III: xvii, 598 p.
IV: xiii, 434 p.
"The ULSI Process Integration Symposium was sponsored by the Electronics Division of the Electrochemical Society and by the Electron Devices Society of the IEEE"--on pref
Includes bibliographical references and indexes
