Chemical Mechanical Planarization : proceedings of the International Symposium
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書誌事項
Chemical Mechanical Planarization : proceedings of the International Symposium
（Proceedings / [Electrochemical Society], v. 2000-26,
Electrochemical Society, c2001-2003
- IV
- V
- VI
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注記
"Dielectric Science and Technology and Electronics Divisions"--on IV T.p
IV:"... held at the 198th Meeting of The Electrochemical Society held in Phoenix, AZ from October 23 to October 25, 2000"--on p. iii
V:"... held at the 201st Meeting of the Electrochemical Society, in Philadelphia, Pennsylvania from May 12th to 17th, 2002" --on p. iii
VI:"... held at the 204th Meeting of the Electrochemical Society, in Orlando, Florida from October 12th to 17th, 2003" --on p. iii
IV: viii, 338 p.
V: vii, 274 p.
VI: vii, 358 p.
Includes bibliographical references and indexes