Microfabricated Systems and MEMS V : proceedings of the International Symposium

Author(s)

• Microfabricated Systems and MEMS
• Hesketh, P. J.
• Electrochemical Society. Sensor Division
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

Bibliographic Information

Microfabricated Systems and MEMS V : proceedings of the International Symposium

editors, P.J. Hesketh ... [et al.]

（Proceedings / [Electrochemical Society], v. 2000-19）

Electrochemical Society, c2000

Note

"Sensor, Dielectric Science & Technology, and Electronics Divisions"--on T.p

"... held in Phoenix, October 2000. This symposium has had a name change to represent the diversity of subject matter involved in the conference sessions"--on pref

Includes bibliographical references and indexes

Details

• NCID: BA54507280
• ISBN:
  • 1566772869
• LCCN: 00107659
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: viii, 258 p.
• Size: 24 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microstructure -- Congresses
  • LCSH : Micromechanics -- Congresses
• Parent Bibliography ID:
  • BA01323290