High Purity Silicon VI : proceedings of the sixth International Symposium

著者

• International Symposium on High Purity Silicon
• Claeys, C. L.
• Electrochemical Society. Electronics Division
• Society of Photo-optical Instrumentation Engineers
• Electrochemical Society. Meeting

書誌事項

High Purity Silicon VI : proceedings of the sixth International Symposium

editors C.L. Claeys ... [et al.] ; sponsored by the Electrochemical Society, Inc., Electronics Division

（Proceedings / [Electrochemical Society], v. 2000-17）（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4218）

Published in cooperation with SPIE-the International Society for Optical Engineering , Electrochemical Society, c2000

注記

"... held in Phoenix, Arizona at the 198th Meeting of the Electrochemical Society, October 22-27, 2000. The Symposium, sponsored by the Electronics Division of the Electrochemical Society and by SPIE"--on pref

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA54509162
• ISBN:
  • 1566772842
• LCCN: 00106821
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.,Pennington, N.J.
• ページ数/冊数: xix, 696 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.15.S55
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Silicon crystals -- Congresses
  • LCSH : Crystal growth -- Congresses
  • LCSH : Semiconductor wafers -- Congresses
• 親書誌ID:
  • BA01323290
  • BA0022700X