Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium

Author(s)

• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
• Sundaram, K. B.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division
• Electrochemical Society. High Temperature Materials Division

Bibliographic Information

Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium

editors, K.B. Sundaram ... [et al.]

（Proceedings / [Electrochemical Society], v. 2001-7）

Electrochemical Society, c2001

Note

"The Dielectric Science and Technology, electronics and High temperature Materials Divisions of the Electrochemical Society co-sponsored the symposium ..."--on pref

"... held on March 25-30, 2001 in Washington, DC U.S.A."--on pref

Includes bibliographical references and indexes

Details

• NCID: BA54513104
• ISBN:
  • 156677313X
• LCCN: 01092446
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: x, 286 p.
• Size: 23 cm
• Classification:
  • LCC : TK7872.T55
• Subject Headings:
  • LCSH : Thin film devices -- Congresses
  • LCSH : Silicon nitride -- Congresses
  • LCSH : Silicon dioxide -- Congresses
  • LCSH : Electric insulators and insulation -- Thin films -- Congresses
• Parent Bibliography ID:
  • BA01323290