Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium
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Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium
（Proceedings / [Electrochemical Society], v. 2001-7）
Electrochemical Society, c2001
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注記
"The Dielectric Science and Technology, electronics and High temperature Materials Divisions of the Electrochemical Society co-sponsored the symposium ..."--on pref
"... held on March 25-30, 2001 in Washington, DC U.S.A."--on pref
Includes bibliographical references and indexes