Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium

著者

• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
• Sundaram, K. B.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division
• Electrochemical Society. High Temperature Materials Division

書誌事項

Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium

editors, K.B. Sundaram ... [et al.]

（Proceedings / [Electrochemical Society], v. 2001-7）

Electrochemical Society, c2001

注記

"The Dielectric Science and Technology, electronics and High temperature Materials Divisions of the Electrochemical Society co-sponsored the symposium ..."--on pref

"... held on March 25-30, 2001 in Washington, DC U.S.A."--on pref

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA54513104
• ISBN:
  • 156677313X
• LCCN: 01092446
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: x, 286 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7872.T55
• 件名:
  • LCSH : Thin film devices -- Congresses
  • LCSH : Silicon nitride -- Congresses
  • LCSH : Silicon dioxide -- Congresses
  • LCSH : Electric insulators and insulation -- Thin films -- Congresses
• 親書誌ID:
  • BA01323290