Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications
著者
書誌事項
Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications
(Materials science and process technology series)
Noyes, c2002
2nd ed
大学図書館所蔵 全9件
  青森
  岩手
  宮城
  秋田
  山形
  福島
  茨城
  栃木
  群馬
  埼玉
  千葉
  東京
  神奈川
  新潟
  富山
  石川
  福井
  山梨
  長野
  岐阜
  静岡
  愛知
  三重
  滋賀
  京都
  大阪
  兵庫
  奈良
  和歌山
  鳥取
  島根
  岡山
  広島
  山口
  徳島
  香川
  愛媛
  高知
  福岡
  佐賀
  長崎
  熊本
  大分
  宮崎
  鹿児島
  沖縄
  韓国
  中国
  タイ
  イギリス
  ドイツ
  スイス
  フランス
  ベルギー
  オランダ
  スウェーデン
  ノルウェー
  アメリカ
注記
Includes bibliographies and index
内容説明・目次
内容説明
The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition.
This second edition explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of submicron dimensions. The book covers PVD, laser and E-beam assisted deposition, MBE, and ion beam methods to bring together all of the physical vapor deposition techniques. The book also includes coverage of chemical mechanical polishing that helps attain the flatness that is required by modern lithography methods and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
目次
Recent Changes in the Semiconductor Industry. 1 Deposition Technologies and Applications: Introduction and Overview. 2 Silicon Epitaxy by Chemical Vapor Deposition. 3 Chemical Vapor Deposition of Silicon Dioxide Films. 4 Metal Organic Chemical Vapor Deposition: Technology and Equipment. 5 Feature Scale Modeling. 6 The Role of Metrology and Inspection In Semiconductor Processing. 7 Contamination Control, Defect Detection, and Yield Enhancement in Gigabit Manufacturing. 8 Sputtering and Sputter Deposition. 9 Laser and Electron Beam Assisted Processing. 10 Molecular Beam Epitaxy: Equipment and Practice. 11 Ion Beam Deposition. 12 Chemical Mechanical Polishing. 13 Organic Dielectrics in Multilevel Metalization of Integrated Circuits. 14 Performance, Processing, and Lithography Trends. Index
「Nielsen BookData」 より