Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.

著者

• Kahn, Harold

書誌事項

Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.

editors, Harold Kahn ... [et al.]

（Materials Research Society symposium proceedings, v. 657）

Materials Research Society, c2001

タイトル別名

Materials science of microelectromechanical systems (MEMS) devices 3

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA54946961
• ISBN:
  • 1558995676
• LCCN: 01044289
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Warrendale, Pa.
• ページ数/冊数: 1 v.
• 大きさ: 24 cm
• 親書誌ID:
  • BA00013775