MEMS & microsystems : design and manufacture

Author(s)

• Hsu, Tai-Ran

Bibliographic Information

MEMS & microsystems : design and manufacture

Tai-Ran Hsu

McGraw-Hill, c2002

Note

Includes bibliographical references (p. 427-431) and index

Details

• NCID: BA55106398
• ISBN:
  • 0072393912
• LCCN: 2001044737
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xii, 436 p.
• Size: 24 cm
• Classification:
  • LCC : TK7874.H794
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectronics
  • LCSH : Microelectromechanical systems
  • LCSH : Microelectronic packaging