Radio frequency power in plasmas : 14th Topical Conference : Oxnard, California 7-9 May 2001

Author(s)

• Mau, Tak Kuen
• DeGrassie, John<>
• American Institute of Physics
• Topical Conference on Radio Frequency Power in Plasmas

Bibliographic Information

Radio frequency power in plasmas : 14th Topical Conference : Oxnard, California 7-9 May 2001

editors, Tak Kuen Mau, John deGrassie

（AIP conference proceedings, 595）

American Institute of Physics, c2001

Details

• NCID: BA55128437
• ISBN:
  • 0735400385
• LCCN: 01096021
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Melville, N.Y
• Pages/Volumes: xvi, 544 p.
• Size: 25 cm
• Parent Bibliography ID:
  • BA00284604