Methods of measurement for semiconductor materials, process control, and devices: quarterly report, January 1 to March 31, 1969

著者
    • Bullis, M. Murray
書誌事項

Methods of measurement for semiconductor materials, process control, and devices: quarterly report, January 1 to March 31, 1969

edited by M. Murray Bullis

(NBS technical note, 488)

U.S. Dept. of Commerce, National Bureau of Standards , For sale by the Superintendent of Documents, U.S. Govt. Print. Off., 1969

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  • NBS technical note

    [U.S. National Bureau of Standards]; for sale by the Supt. of Docs., U.S. Govt. Print. Off

詳細情報
  • NII書誌ID(NCID)
    BA56325863
  • 出版国コード
    us
  • タイトル言語コード
    eng
  • 本文言語コード
    eng
  • 出版地
    [Washington],Washington
  • ページ数/冊数
    iv, 41 p.
  • 大きさ
    26 cm
  • 親書誌ID
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