Methods of measurement for semiconductor materials, process control, and devices: quarterly report, January 1 to March 31, 1969

Author(s)

• Bullis, M. Murray

Bibliographic Information

Methods of measurement for semiconductor materials, process control, and devices: quarterly report, January 1 to March 31, 1969

edited by M. Murray Bullis

（NBS technical note, 488）

U.S. Dept. of Commerce, National Bureau of Standards , For sale by the Superintendent of Documents, U.S. Govt. Print. Off., 1969

• NCID: BA56325863
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: [Washington],Washington
• Pages/Volumes: iv, 41 p.
• Size: 26 cm
• Parent Bibliography ID:
  • BA12630826