Methods of measurement for semiconductor materials, process control, and devices: quarterly report, January 1 to March 31, 1969
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Methods of measurement for semiconductor materials, process control, and devices: quarterly report, January 1 to March 31, 1969
（NBS technical note, 488）
U.S. Dept. of Commerce, National Bureau of Standards , For sale by the Superintendent of Documents, U.S. Govt. Print. Off., 1969
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