MEMS and NEMS : systems, devices, and structures
著者
書誌事項
MEMS and NEMS : systems, devices, and structures
（Nano- and microscience, engineering, technology and medicine series）
CRC, c2002
大学図書館所蔵 全21件
注記
Includes bibliographical references and index
MEMS and NEMS : systems, devices, and structures
（Nano- and microscience, engineering, technology and medicine series）
CRC, c2002
Includes bibliographical references and index