Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A.

Author(s)

• Babu, Suryadevara V.
• Cadien, Kenneth C.
• Yano, Hiroyuki

Bibliographic Information

Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A.

editors, Suryadevara V. Babu ... [et al.]

（Materials Research Society symposium proceedings, v. 671）

Materials Research Society, c2001

Note

Includes bibliographical references and indexes

Details

• NCID: BA56818816
• ISBN:
  • 1558996079
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale, PA
• Pages/Volumes: 1 v.
• Size: 24 cm
• Parent Bibliography ID:
  • BA00013775