2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2002 proceedings, April 30-May 2, 2002, Boston, Massachusetts, USA
著者
書誌事項
2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2002 proceedings, April 30-May 2, 2002, Boston, Massachusetts, USA
IEEE Service Center, c2002
- : soft
- タイトル別名
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02CH37259
The 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference : advancing the science and technology of semiconductor manufacturing : ASMC 2002, April 30-May 2, Seaport Hotel, Boston, MA USA
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注記
Includes bibliographical references
"IEEE catalog number 02CH37259"--on cover
内容説明・目次
内容説明
This text originated from the 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop, and examines the manufacture of circuits and devices. Topics covered include: advanced meteorology; cost reduction; MEMS technology; time-to-market; and factory automation.
目次
- Advanced Meteorology
- Advanced Processes
- Contamination Free Manufacturing (CFM)
- Cost Reduction
- Equipment Reliability & Productivity
- Factory Automation
- Factory Dynamics
- 300 mm Manufacturing
- MEMS Technology
- Photolithography Challenges & Advances
- Time-to-Market
- Workforce Issues
- Yield
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