2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2002 proceedings, April 30-May 2, 2002, Boston, Massachusetts, USA

著者

• IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
• Institute of Electrical and Electronics Engineers
• Semiconductor Equipment and Materials International

書誌事項

2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2002 proceedings, April 30-May 2, 2002, Boston, Massachusetts, USA

IEEE Service Center, c2002

• : soft

タイトル別名

02CH37259

The 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference : advancing the science and technology of semiconductor manufacturing : ASMC 2002, April 30-May 2, Seaport Hotel, Boston, MA USA

注記

Includes bibliographical references

"IEEE catalog number 02CH37259"--on cover

詳細情報

• NII書誌ID(NCID): BA56874216
• ISBN:
  • 0780371585
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway, NJ
• ページ数/冊数: v, 430 p.
• 大きさ: 28 cm