Technical digest, MEMS 2002, ieee international conference, Las Vegas : the fifteenth IEEE International Conference on Micro Electro Mechanical Systems , Lasvegas, Nevada, USA, January 20-24, 2002

著者

• IEEE Robotics and Automation Society
• IEEE Annual International Conference on Micro Electro Mechanical Systems

書誌事項

Technical digest, MEMS 2002, ieee international conference, Las Vegas : the fifteenth IEEE International Conference on Micro Electro Mechanical Systems , Lasvegas, Nevada, USA, January 20-24, 2002

sponsored by IEEE and the Robotics and Automation Society

IEEE Operations Center, c2002

タイトル別名

IEEE Micro Electro Mechanical Systems Conference technical digest 2002

02CH37266

注記

"IEEE catalog number: 02CH37266" -- T. p.

詳細情報

• NII書誌ID(NCID): BA56874318
• ISBN:
  • 0780371852
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway, N.J.
• ページ数/冊数: xliii, 737 p.
• 大きさ: 28 cm