Technical digest, MEMS 2002, ieee international conference, Las Vegas : the fifteenth IEEE International Conference on Micro Electro Mechanical Systems , Lasvegas, Nevada, USA, January 20-24, 2002

Author(s)

• IEEE Robotics and Automation Society
• IEEE Annual International Conference on Micro Electro Mechanical Systems

Bibliographic Information

Technical digest, MEMS 2002, ieee international conference, Las Vegas : the fifteenth IEEE International Conference on Micro Electro Mechanical Systems , Lasvegas, Nevada, USA, January 20-24, 2002

sponsored by IEEE and the Robotics and Automation Society

IEEE Operations Center, c2002

Other Title

IEEE Micro Electro Mechanical Systems Conference technical digest 2002

02CH37266

Note

"IEEE catalog number: 02CH37266" -- T. p.

Details

• NCID: BA56874318
• ISBN:
  • 0780371852
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Piscataway, N.J.
• Pages/Volumes: xliii, 737 p.
• Size: 28 cm