Optical microscanners and microspectrometers using thermal bimorph actuators

Author(s)

• Lammel, Gerhard
• Schweizer, Sandra
• Renaud, Philippe

Bibliographic Information

Optical microscanners and microspectrometers using thermal bimorph actuators

by Gerhard Lammel, Sandra Schweizer and Philippe Renaud

（Microsystems / series editor Stephen D. Senturia, 8）

Kluwer Academic Publishers, c2002

Note

Includes bibliographical references and index

Details

• NCID: BA57451047
• ISBN:
  • 0792376552
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boston
• Pages/Volumes: xii, 268 p.
• Size: 25 cm
• Parent Bibliography ID:
  • BA39071521