Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.

著者

• Materials Research Society
• Ayón, Arturo A.
• Buchheit, Thomas E.
• Kahn, Harold
• Spearing, S. Mark

書誌事項

Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.

editors, Arturo A. Ayón ... [et al.]

（Materials Research Society symposium proceedings, v. 687）

Materials Research Society, c2002

タイトル別名

Materials science of microelectromechanical systems (MEMS) devices 4

Materials science of microelectromechanical systems (MEMS) devices four

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA57659263
• ISBN:
  • 1558996230
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Warrendale, Pa.
• ページ数/冊数: xi, 318 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA00013775