Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.

Author(s)

• Materials Research Society
• Ayón, Arturo A.
• Buchheit, Thomas E.
• Kahn, Harold
• Spearing, S. Mark

Bibliographic Information

Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.

editors, Arturo A. Ayón ... [et al.]

（Materials Research Society symposium proceedings, v. 687）

Materials Research Society, c2002

Other Title

Materials science of microelectromechanical systems (MEMS) devices 4

Materials science of microelectromechanical systems (MEMS) devices four

Note

Includes bibliographical references and indexes

Details

• NCID: BA57659263
• ISBN:
  • 1558996230
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale, Pa.
• Pages/Volumes: xi, 318 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA00013775