Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA

著者

• Society of Photo-optical Instrumentation Engineers
• Duparré, Angela
• Singh, Bhanwar

書誌事項

Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA

Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4449）

SPIE, c2001

注記

Includes bibliographic references and index

詳細情報

• NII書誌ID(NCID): BA58045904
• ISBN:
  • 0819441635
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: ix, 294 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X