Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia

Author(s)

• Society of Photo-optical Instrumentation Engineers
• Bergmann, Neil W.
• Abbott, Derek
• Hariz, Ahsan J.
• Varadan, V. K.

Bibliographic Information

Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia

Neil W. Bergmann, Derek Abbott, Ahsan J. Hariz, Vijay K. Varadan, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, ; cosponsored by U. S. Air Force Office of Scientific Reserch Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4591）

SPIE--the International Society of Optical Engineering, c2001

Note

Includes index

Details

• NCID: BA5880187X
• ISBN:
  • 0819443212
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: ix, 392 p.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X