Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia

著者

• Society of Photo-optical Instrumentation Engineers
• Bergmann, Neil W.
• Abbott, Derek
• Hariz, Ahsan J.
• Varadan, V. K.

書誌事項

Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia

Neil W. Bergmann, Derek Abbott, Ahsan J. Hariz, Vijay K. Varadan, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, ; cosponsored by U. S. Air Force Office of Scientific Reserch Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4591）

SPIE--the International Society of Optical Engineering, c2001

注記

Includes index

詳細情報

• NII書誌ID(NCID): BA5880187X
• ISBN:
  • 0819443212
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: ix, 392 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X