Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia

著者

• Society of Photo-optical Instrumentation Engineers
• Chiao, Jung-Chih
• Fraone, Lorenzo
• Harrison, H. Barry
• Shkel, Andrei M.

書誌事項

Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia

Jung-Chih Chiao, Lorenzo Fraone, H. Barry Harrison, Andrei M. Shkel, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, ; cosponsored by U. S. Air Force Office of Scientific Reserch Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4592）

SPIE--the International Society of Optical Engineering, c2001

注記

Includes index

詳細情報

• NII書誌ID(NCID): BA58802522
• ISBN:
  • 0819443220
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: xi, 538 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X