Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.

Author(s)

• Downey, Daniel F.

Bibliographic Information

Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.

editors, Daniel F. Downey ... [et al.]

（Materials Research Society symposium proceedings, v. 717）

Materials Research Society, c2002

Note

Includes bibliographical references and indexes

Details

• NCID: BA5886207X
• ISBN:
  • 1558996532
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale, Pa.
• Pages/Volumes: xi, 312 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA00013775