Electrochemical processing in ULSI fabrication III : proceedings of the international symposium

著者

• Andricacos, P. C.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

書誌事項

Electrochemical processing in ULSI fabrication III : proceedings of the international symposium

editors, P. C. Andricacos ...[et al.] ; sponsoring divisions, Electrodeposition, Dielectric Science and Technology, Electronics

（Proceedings / [Electrochemical Society], v. 2000-8）

Electrochemical Society, c2002

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA59001824
• ISBN:
  • 1566772737
• LCCN: 2002102531
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: viii, 258 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290