Bibliographic Information

Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium

editors, J. Ruzyllo ... [et al.]

(Proceedings / [Electrochemical Society], v. 2001-26)

Electrochemical Society, c2002

Other Title

Cleaning technology in semiconductor device manufacturing VII

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Note

Includes bibliographical references and indexes

Related Books: 1-1 of 1

  • Proceedings

    [Electrochemical Society]

    Electrochemical Society

Details

  • NCID
    BA59009371
  • ISBN
    • 1566773598
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Pennington, N.J.
  • Pages/Volumes
    x, 374 p.
  • Size
    24 cm
  • Parent Bibliography ID
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