Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA

著者

• Karam, Jean Michel
• Yasaitis, John
• Semiconductor Equipment and Materials International
• Society of Photo-optical Instrumentation Engineers

書誌事項

Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA

Jean Michel Karam, John Yasaitis, chair/editor ; sponsored and published by SPIE--The International Society of Optical Engineering ; cooperationg organizations, Semiconductor Equipment and Materials International (USA) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4557）

SPIE, c2001

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BA59252890
• ISBN:
  • 0819442852
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: x, 485 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ1191.5
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Electromechanical devices -- Design and construction -- Congresses
• 親書誌ID:
  • BA0022700X