Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA
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Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4557)
SPIE, c2001
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Includes bibliographical references and index