Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA

Author(s)

• Karam, Jean Michel
• Yasaitis, John
• Semiconductor Equipment and Materials International
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA

Jean Michel Karam, John Yasaitis, chair/editor ; sponsored and published by SPIE--The International Society of Optical Engineering ; cooperationg organizations, Semiconductor Equipment and Materials International (USA) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4557）

SPIE, c2001

Note

Includes bibliographical references and index

Details

• NCID: BA59252890
• ISBN:
  • 0819442852
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: x, 485 p.
• Size: 28 cm
• Classification:
  • LCC : TJ1191.5
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Electromechanical devices -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA0022700X