Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA

著者

• Ramesham, Rajeshuni
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International

書誌事項

Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA

Rajeshuni Ramesham, chair/editor ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4558）

SPIE, c2001

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA5925350X
• ISBN:
  • 0819442860
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: xxvii, 296 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X