MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA
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MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4559)
SPIE, c2001
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Includes bibliographical references and index