MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA

Author(s)

• Helvajian, Henry
• Janson, Siegfried W.
• Lärmer, Franz
• Society of Photo-optical Instrumentation Engineers
• United States. Defense Advanced Research Projects Agency

Bibliographic Information

MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA

Henry Helvajan, Siegfried W. Janson, Franz Lärmer, chair/editor ; sponsored and published by SPIE--The International Society for Optical Engineering ; cosponsored by DARPA--Defense Advanced Research Projects Agency (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4559）

SPIE, c2001

Note

Includes bibliographical references and index

Details

• NCID: BA59269088
• ISBN:
  • 0819442879
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: xxvii, 190 p.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X