Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK

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書誌事項

Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK

Martin Fallon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4405）

SPIE, c2001

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注記

Includes bibliographic references and author index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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