Smart structures and materials 2002 : smart electronics, MEMS, and nanotechnology : 18-21 March 2002, San Diego, USA
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Smart structures and materials 2002 : smart electronics, MEMS, and nanotechnology : 18-21 March 2002, San Diego, USA
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4700)
SPIE, c2002
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Includes bibliographical references and index

