Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom

Author(s)

• Syms, Richard R. A.
• Society of Photo-optical Instrumentation Engineers
• European Optical Society
• Institution of Electrical Engineers
• Institution of Mechanical Engineers (Great Britain)

Bibliographic Information

Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom

Richard R.A. Syms, chair/editor ; sponsored by EOS--European Optical Society ... [et al.] ; cooperating organizations, IEE--Institute of Electrical Engineers(UK), IMechE--the Institution of Mechanical Engineers(UK)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4075）（Proceedings EurOpto series）

SPIE, c2000

Note

Includes bibliographical references and index

Details

• NCID: BA60241847
• ISBN:
  • 0819437123
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: viii, 192 p.
• Size: 28 cm
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronic devices -- Congresses
  • LCSH : Microfabrication -- Congresses
• Parent Bibliography ID:
  • BA0022700X
  • BA22033277