Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom

著者

• Syms, Richard R. A.
• Society of Photo-optical Instrumentation Engineers
• European Optical Society
• Institution of Electrical Engineers
• Institution of Mechanical Engineers (Great Britain)

書誌事項

Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom

Richard R.A. Syms, chair/editor ; sponsored by EOS--European Optical Society ... [et al.] ; cooperating organizations, IEE--Institute of Electrical Engineers(UK), IMechE--the Institution of Mechanical Engineers(UK)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4075）（Proceedings EurOpto series）

SPIE, c2000

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA60241847
• ISBN:
  • 0819437123
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: viii, 192 p.
• 大きさ: 28 cm
• 件名:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronic devices -- Congresses
  • LCSH : Microfabrication -- Congresses
• 親書誌ID:
  • BA0022700X
  • BA22033277