CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications

Author(s)

• Lange, D.
• Brand, Oliver
• Baltes, H. (Henry)

Bibliographic Information

CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications

D. Lange, O. Brand, H. Baltes

（Microtechnology and MEMS）

Springer-Verlag, c2002

Note

Includes bibliographical references (p. [131]-140) and index

Details

• NCID: BA60423276
• ISBN:
  • 3540431438
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Berlin
• Pages/Volumes: viii, 142 p.
• Size: 25 cm
• Parent Bibliography ID:
  • BA51409718