In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland
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Society of Photo-optical Instrumentation Engineers
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European Commission. Directorate-General XII, Science, Research, and Development
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Sira Technology Centre (U.K.)
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Institution of Electrical Engineers
Author(s)
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Society of Photo-optical Instrumentation Engineers
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European Commission. Directorate-General XII, Science, Research, and Development
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Sira Technology Centre (U.K.)
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Institution of Electrical Engineers
Bibliographic Information
In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland
Kostas Amberiadis ... [et al.], chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise, Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers
(Proceedings EurOpt series)(Proceedings / SPIE -- the International Society for Optical Engineering, v. 3743)
SPIE, c1999
Available at / 2 libraries
Note
Includes bibliographic references and author index
Related Books: 1-2 of 2
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Proceedings EurOpt series
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SPIE -- the International Society for Optical Engineering
SPIE -- the International Society for Optical Engineering