In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland

著者

• Amberiadis, Kostas
• European Optical Society
• Society of Photo-optical Instrumentation Engineers
• European Commission. Directorate-General XII, Science, Research, and Development
• Scottish Enterprise
• Sira Technology Centre (U.K.)
• Institution of Electrical Engineers

書誌事項

In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland

Kostas Amberiadis ... [et al.], chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise, Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers

（Proceedings EurOpt series）（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3743）

SPIE, c1999

注記

Includes bibliographic references and author index

• NII書誌ID(NCID): BA60498209
• ISBN:
  • 0819432237
• LCCN: 00266407
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: viii, 344 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC21 : 621.3815
• 件名:
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction Congresses
  • LCSH : Semiconductors -- Design and construction Congresses
  • LCSH : Manufacturing processes Congresses
  • LCSH : Microelectronics -- Materials Congresses
• 親書誌ID:
  • BA31190072
  • BA0022700X