Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland

Author(s)

• Mack, Chris A.
• Stevenson, Tom, Dr
• European Optical Society

Bibliographic Information

Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland

Chris A. Mack, Tom Stevenson, chairs/editors ; sponsored by EOS--European OPtical Society ... [et al.]

（Proceedings EurOpt series）（Proceedings / SPIE -- the International Society for Optical Engineering, 3741）

SPIE, c1999

Note

Includes bibliographical references and index

Details

• NCID: BA60527894
• ISBN:
  • 0819432210
• LCCN: 00502114
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: vii, 262 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Semiconductors -- Etching -- Congresses
  • LCSH : Microlithography -- Congresses
• Parent Bibliography ID:
  • BA31190072
  • BA0022700X