Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland

Author(s)

• Yallup, Kevin
• Narasimhan, Murali K.
• European Optical Society
• Society of Photo-optical Instrumentation Engineers
• European Commission. Directorate-General XII, Science, Research, and Development

Bibliographic Information

Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland

Kevin Yallup, Murali K. Narasimhan, chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise, Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers

（Proceedings EurOpt series）（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3742）

SPIE, c1999

Note

Includes bibliographic references and author index

Details

• NCID: BA60527919
• ISBN:
  • 0819432229
• LCCN: 00266414
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: vii, 206 p.
• Size: 28 cm
• Classification:
  • LCC : TK7836
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectronics industry -- Production control Congresses
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction Congresses
  • LCSH : Microelectronics -- Materials Congresses
• Parent Bibliography ID:
  • BA31190072
  • BA0022700X