Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland

著者

    • Yallup, Kevin
    • Narasimhan, Murali K.
    • European Optical Society
    • Society of Photo-optical Instrumentation Engineers
    • European Commission. Directorate-General XII, Science, Research, and Development

書誌事項

Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland

Kevin Yallup, Murali K. Narasimhan, chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise, Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers

（Proceedings EurOpt series）（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3742）

SPIE, c1999

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注記

Includes bibliographic references and author index

関連文献： 2件中  1-2を表示

  • Proceedings EurOpt series

    SPIE--the International Society for Optical Engineering

  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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