Surface scattering and diffraction for advanced metrology : 1 August 2001 San Diego, USA

Author(s)

Bibliographic Information

Surface scattering and diffraction for advanced metrology : 1 August 2001 San Diego, USA

Zu-Han Gu, Alexei A. Maradudin chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4447）

SPIE, c2001

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Note

Includes index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

Details

  • NCID
    BA60568574
  • ISBN
    • 0819441619
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Bellingham, Wash.
  • Pages/Volumes
    vii, 164 p.
  • Size
    28 cm
  • Parent Bibliography ID
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