Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium

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書誌事項

Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium

editor, L. Mendicino ; sponsoring divisions, Dielectric Science and Technology and Electroncis

(Proceedings / [Electrochemical Society], v. 2002-15)

Electrochemical Society, c2002

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注記

"... The Fifth Annual Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries was held at the 201st Meeting of the Electrochemical Society in Philadelphia, PA"--on pref

Includes bibliographical references and indexes

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  • Proceedings

    [Electrochemical Society]

    Electrochemical Society

詳細情報
  • NII書誌ID(NCID)
    BA60592998
  • ISBN
    • 1566773377
  • LCCN
    2002111760
  • 出版国コード
    us
  • タイトル言語コード
    eng
  • 本文言語コード
    eng
  • 出版地
    Pennington, N.J.
  • ページ数/冊数
    viii, 262 p.
  • 大きさ
    24 cm
  • 親書誌ID
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