Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium

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Bibliographic Information

Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium

editor, L. Mendicino ; sponsoring divisions, Dielectric Science and Technology and Electroncis

(Proceedings / [Electrochemical Society], v. 2002-15)

Electrochemical Society, c2002

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Note

"... The Fifth Annual Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries was held at the 201st Meeting of the Electrochemical Society in Philadelphia, PA"--on pref

Includes bibliographical references and indexes

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  • Proceedings

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    Electrochemical Society

Details

  • NCID
    BA60592998
  • ISBN
    • 1566773377
  • LCCN
    2002111760
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Pennington, N.J.
  • Pages/Volumes
    viii, 262 p.
  • Size
    24 cm
  • Parent Bibliography ID
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