Plasma processing XIV : proceedings of the international symposium

Author(s)

• International Symposium on Plasma Processing
• Mathad, G. S.
• Allendorf, Mark Donald
• Sah, R. E.
• Yang, M.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

Bibliographic Information

Plasma processing XIV : proceedings of the international symposium

editor, G.S. Mathad ; assistant editors, M.D. Allendorf, R.E. Sah, M. Yang ; sponsoring divisions, Dielectric Science and Technology and Electronics

（Proceedings / [Electrochemical Society], v. 2002-17）

Electrochemical Society, c2002

Note

Includes bibliographical references and indexes

"The symposium, cosponsored by the Dielectric Science & Technology and Electronics divisions, was held as part of the 201st Centennial Meeting of The Electrochemical Society, Inc., in Philadelphia, PA, May 12-17, 2002"--on pref

Details

• NCID: BA60593447
• ISBN:
  • 1566773415
• LCCN: 2002112473
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: ix, 324 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA01323290