Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA

Author(s)

• Helvajian, Henry
• United States. Air Force. Office of Scientific Research
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA

Henry Helvajian, ... [et al.], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research, SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3933）

SPIE, c2000

Note

Includes bibliographic references and author index

Details

• NCID: BA60685953
• ISBN:
  • 0819435503
• LCCN: 2001266844
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: xi, 514 p.
• Size: 28 cm
• Classification:
  • LCC : TK7836
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectronics industry -- Equipment and supplies -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Manufacturing processes -- Congresses
  • LCSH : Laser ablation -- Congresses
  • LCSH : Optoelectronic devices -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA0022700X