16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany

著者

• European Conference on Mask Technology for Integrated Circuits and Microcomponents (16th : 1999 : Munich, Germany)
• Behringer, Uwe
• VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
• Forschungszentrum Karlsruhe. Institute for Microstructure Technology
• Society of Photo-optical Instrumentation Engineers

書誌事項

16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany

Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) ; cooperating organization, Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3996）

SPIE, c2000

注記

At head of title: Proceedings

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA60711099
• ISBN:
  • 0819436143
• LCCN: 2001267976
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: xii, 252 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7872.M3
  • DC21 : 621.3815
• 件名:
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : Microlithography -- Congresses
• 親書誌ID:
  • BA0022700X