Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
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書誌事項
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
（Proceedings / [Electrochemical Society], v. 2002-2）
The Electrochemical Society, c2002
- : set
- v. 1
- v. 2
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注記
"... the Ninth International Symposium on Silicon Materials Science and Technology, held May 13-17, 2002 in Philadelphia during the centennial anniversary of The Electrochemical Society, Inc" --on pref.
Includes bibliographical references and index