Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology

Bibliographic Information

Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology

editors, H.R. Huff, L. Fabry, S. Kishino ; sponsoring division, Electronics

(Proceedings / [Electrochemical Society], v. 2002-2)

The Electrochemical Society, c2002

  • : set
  • v. 1
  • v. 2

Available at  / 4 libraries

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Note

"... the Ninth International Symposium on Silicon Materials Science and Technology, held May 13-17, 2002 in Philadelphia during the centennial anniversary of The Electrochemical Society, Inc" --on pref.

Includes bibliographical references and index

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  • Proceedings

    [Electrochemical Society]

    Electrochemical Society

Details

  • NCID
    BA60982595
  • ISBN
    • 1566773741
    • 1566773687
    • 1566773733
  • LCCN
    2002103603
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Pennington, NJ
  • Pages/Volumes
    2 v. (xx, 1074 p.)
  • Size
    24 cm
  • Parent Bibliography ID
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