書誌事項

Laser interferometry IX : applications : 22-23 July 1998, San Diego, California

Ryszard J. Pryputniewicz, Gordon M. Brown, Werner P.O. Jüptner, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organization, SEM--Society for Experimental Mechanics

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 3479)

SPIE, c1998

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注記

Includes bibliographical references and author index

内容説明・目次

内容説明

The various applications of laser interferometry are covered in this volume. The subjects include flatness and surface measurements, surface characterisation, and shape and distance measurement.

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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