Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California

著者

• Smith, James H.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International

書誌事項

Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California

James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3511）

SPIE, c1998

注記

Includes bibliographical references and author index

内容説明・目次

内容説明

An analysis of micromachining and microfabrication process technology. It covers: direct write; new processes; antistiction and assembly; new technologies; and more.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA61054561
• ISBN:
  • 0819429708
• LCCN: 99200342
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: xi, 402 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ1191.5
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Micromachining Congresses
  • LCSH : Microfabrication Congresses
  • LCSH : Electromechanical devices -- Design and construction Congresses
• 親書誌ID:
  • BA0022700X