MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA

Author(s)

• Motamedi, M. Edward
• Göring, Rolf
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

Bibliographic Information

MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA

M. Edward Motamedi, Rolf Göering, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4178）

SPIE, c2000

Note

Includes bibliographical references and index

Details

• NCID: BA61056206
• ISBN:
  • 0819438340
• LCCN: 2001267485
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: viii, 412 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Miniature electronic equipment -- Congresses
  • LCSH : Micromechanics -- Congresses
  • LCSH : Optoelectronic devices -- Congresses
• Parent Bibliography ID:
  • BA0022700X